UVA Virtual Lab: Molecular Beam Epitaxy (MBE)
               
 
© 2003-2008 J.C. Bean

 

 
Here we show a fast-forward version of the entire MBE process of:

- Wafer loading

- Wafer pump down

- FIB pre-patterning

- Growth chamber loading

- A side trip to dissect the e-guns

- Wafer cleaning

- MBE deposition